Vacuum systems often involve processes with significant thermal output, requiring chambers with integrated cooling options. Applications involving high heat loads include: vacuum deposition methods such as CVD, MOCVD, PVD, MBE and IBAD; crystal growth, space simulation, and vacuum furnaces.

Numerous options exist for cooling vacuum chambers

It is important to consider the effective thermal transfer and cost of these basic options when designing your chamber.


Double Wall Chamber

Hydro-formed Chamber

Welded “C” Channel

Chamber Cooling Options

Double Wall Chamber
Covered Channels (machined into wall)
Hydro-formed Channels
Welded ‘C’ Channels
Wrapped Tubes

Thermal Transfer

Very High

Cost Effectiveness

Very Good

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