Does your vacuum process chamber require integrated cooling?

Posted on: April 20, 2017

Vacuum systems often involve processes with significant heat output, requiring chambers with integrated cooling options. Applications with thermal management issues include: Vacuum Deposition (CVD, MOCVD, PVD and IBAD), Crystal Growth/Pulling, Space Simulation, and Vacuum Furnaces.

liquid cooled vacuum chamber

Double Wall Chamber

Double wall chamber designs are best for applications with very high heat loads. Separating chamber walls with baffles to promote flow or circulation provides the most effective method of heat removal from a system. The example shows inner and outer walls tacked, holes bored, and ready for ports to be welded.

Hyrdro-Formed Channels

Hyrdro-Formed Channels offer approximately 2X the surface area of conventional C channels. Radius bends instead of corners improve flow and eliminate stagnant areas. Cooling channels are produced by welding a trace to a chamber, then using water pressure to form open flow paths. Full penetration welds at channel edges reduce the risk of cracks or corrosion, extending the working life of the chamber.

Welded Channels

Welded channels are sufficient for lower heat load systems. ‘C’ channels welded to a surface provide cooling paths. Channels that are milled into the wall thickness improve thermal transfer. The design parameters, cost impact, and effective cooling all vary by configuration.

Relative effectiveness of typical chamber cooling options:

Cooling OptionThermal TransferCost Effectiveness
Double WalledVery highVery Good
Machined in TraceHighGood
Hydro-formed ChannelsHighGood
Welded C Channel ModerateAverage
Wrapped TubeLowPoor

Anderson Dahlen (ADI) Applied Vacuum Division has more than 25 year experience providing integrated cooling options on vacuum chambers, assemblies flanges, designing and integrating cooling options for custom vacuum flanges and chambers. All chambers and components undergo pressure-testing for all cooling channels and cavities, as well as helium leak checking all internal and external welds. Contact us today for more information.

Our manufacturing and quality systems are certified to ISO 9001:2015 and Nuclear Quality Assurance (NQA-1).