High Vacuum Viewport Shutter

Posted on: July 21, 2017

We offer multiple versions of high vacuum viewport shutter. These viewports are designed for coating systems, where the expense of a UHV viewport is cost prohibitive, and the physical size of the UHV rotary feedthrough is too cumbersome. These shutters offer the advantage of a short length to maximize viewing angle into the coating chamber, and do not require an additional vacuum port for a traditional teardrop style shutter.

The viewports include an easy to remove borosilicate glass disc for viewing, and a stainless steel shutter blade to prevent coating build up on the viewing glass. The shutter is vacuum sealed from the side of the mounting flange to maintain a low aspect ratio on the chamber. Shutter bodies are available in stainless steel and aluminum, to suit different flange styles including ASA and ISO styles.

ADI – Applied Vacuum Division designs and manufactures custom flanges, components, chambers, chassis and integrated assemblies for High Vacuum (HV), Ultra-High Vacuum (UHV) and Extreme High Vacuum (XHV) requirements.

Since 1989, we have been fabricating custom products for vacuum deposition systems involving E-beam, PVD, MOCVD, ALD, Epitaxy and other processes. We have tremendous capacity and capabilities for metal forming, precision machining, and critical welding which are ideal for manufacturing chambers and related products for vacuum process equipment. Let our experienced engineers help you take requirements from initial concepts, to fully engineered designs, to completed and tested products ready for use.