Custom Vacuum Systems

At Anderson Dahlen, our engineers are skilled at combining expertise in chamber and component manufacturing with instrumentation and controls to provide custom vacuum assemblies. Our team provides integrated solutions ranging from your chamber mounted on a simple frame with an appropriate pumping package up to fully automated and PLC-controlled vacuum systems.

1. Basic – Chamber, frame, pumps, and plumbing with solenoid actuated valve options, assembled and ready-for-use
2. Intermediate – All basic elements plus controls and pressure gauging. Options include manual switch panels or touch panel HMI systems.
3. Complex – A fully integrated system including pumps, power supplies, sources, instrumentation and controls with PC-based interface for recipe-driven process control, data logging, and reporting. Options include heaters, chillers, deposition sources, and in-situ measurement.