Custom Vacuum Systems

The Best Combination of Value and Performance

Integrated Equipment Solutions To Turnkey Vacuum Systems

At Anderson Dahlen, our engineers are skilled at combining expertise in chamber and component manufacturing with instrumentation and controls to provide custom vacuum assemblies. Our team provides integrated solutions ranging from your chamber mounted on a simple frame with an appropriate pumping package up to fully automated and PLC-controlled vacuum systems.

  1. Basic – Chamber, frame, pumps, and plumbing with solenoid actuated valve options, assembled and ready-for-use
  2. Intermediate – All basic elements plus controls and pressure gauging. Options include manual switch panels or touch panel HMI systems.
  3. Complex – A fully integrated system including pumps, power supplies, sources, instrumentation and controls with PC-based interface for recipe-driven process control, data logging, and reporting. Options include heaters, chillers, deposition sources, and in-situ measurement.
Sputter Coating Tool
Custom Coating Tool

Design-Build Capabilities

Anderson Dahlen builds custom-designed vacuum systems around your application with your specific process in mind. Our solutions are 100% custom to your needs – no two projects are the same.

We design for many applications, including pumps, power supplies, sources, instrumentation, and controls. The PC-based interface allows recipe-driven process control with full data logging and report generation, with maintenance functions including kWh monitoring and hour monitoring sources and components providing cautionary flags and critical system safety shutdown as appropriate.

Our user-friendly software interface displays system status in real time, including the status of process parameters, valve position, and utility status.

Our team is here to answer questions, provide quotes, and offer customer support. Let us know how we can help.